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Sputtering System
Evaporation System
PE-CVD System
Ion Plating System
Others System
Vacuum components

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  • Sputtering System

    The equipment to create metal and oxide thin film in the form of a single-layer film or of multi-layer film
  • Evaporation System

    The method of evaporating and depositing metallic materials in
    the way of resistance heating in vacuum chamber
  • CVD System

    The equipment to injecting chemical vapor in vacuum chamber
    in the PE-CVD method and inducing plasma to create a thin film
  • Ion Plating System

    Mainly applicable to the coating of cutting tools or machines
    that require hard coating film
  • Others System

    Applicable to various industrial areas through the accumulated know-how and vacuum technology
  • Vacuum Components

    Production, manufacturing, and delivery of main vacuum parts
    as well as industrial system