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PE-CVD System
PECVD

 

Device Overview

Chemical material injection under vacuum state and using plasma.
Electrons which get high energy hit the gas and disintegration the gas molecule.
So the gas atom plates on the basement.
Head lamp for car and Accessory High polymer

Composition

Chamber size : Φ1,500 x 1,600 L
Ultimate pressure : 3.0 x 10-6Torr below
Pumping speed : 5.0 x 10-5Torr/10min below
Processing capacity : 240 ~ 320pcs
Driving Unit : 6~8 sets
Heater material : W- Coil Heater
Coating material : Al ,Cr
PECVD
PECVD
PECVD
PECVD

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