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Ion Plating System
Ion Beam Test System
Device Overview
Under vacuum ion room, ion beam makes ionized the atom and combine the ion beam and accelerate.
Then Ion beam lunching on the process of injection to the main product.
Composition
Chamber size :¡Ë450 x400
Ultimate pressure : 3.0 x 10-9 Torr below
Pumping speed : 5.0 x 10-6Torr/20min below
Gas : Ar, N2,