Chamber size : ¥Õ1,500 x 1,600 L
Ultimate pressure : 3.0 x 10-6Torr below
Pumping speed : 5.0 x 10-5Torr/10min below
Processing capacity : 240 ~ 320pcs
Driving Unit : 6~8 sets
Heater material : W- Coil Heater
Coating material : Al ,Cr
Power Supply : AC
Gas : Ar, N2O, HMDSO